The influence of synthesis temperature on structure properties of BaXSr1-XTiO3 ferroelectric films
A. K. Mikhailov, A. V. Tumarkin, and S. V. Razumov
Dept. of Electronics, St.-Peterburg Electrotechnical University, 5 Prof. Popov st., 197376, St.-Peterburg, Russia
Abstract – The results of structure investigations of (Ba,Sr)TiO3 films depending on synthesis temperature are presented. Electrical characteristics of planar capacitors based on prepared films are investigated. Finally, the technological conditions of high structure quality (Ba,Sr)TiO3 films preparation are determined. (Ba,Sr)TiO3 films prepared under those conditions possess electrical characteristics sufficient for room temperature microwave applications in a wide frequency range. |